A highly sensitive humidity sensor based
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Padmanathan Karthick Kannan; Ramiah Saraswathi; John Bosco Balaguru Rayappan
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Article
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2010
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Elsevier Science
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English
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Nanostructured ZnO thin film was prepared by DC reactive magnetron sputtering and characterized by X-ray diffraction, SEM, AFM, FT-IR spectroscopy, UV-vis spectroscopy and photoluminescence measurements. Under the conditions employed, the sputtered ZnO film was found to be polycrystalline with grain