✦ LIBER ✦
Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devices
✍ Scribed by Samadhan B. Patil; Anand V. Vairagar; Alka A. Kumbhar; Laxmi K. Sahu; V. Ramgopal Rao; N. Venkatramani; R.O. Dusane; B. Schroeder
- Book ID
- 108388604
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 345 KB
- Volume
- 430
- Category
- Article
- ISSN
- 0040-6090
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