✦ LIBER ✦
Highly concentrated ozone gas supplied at an atmospheric pressure condition as a new oxidizing reagent for the formation of SiO2thin film on Si
✍ Scribed by Kunihiko Koike; Shingo Ichimura; Akira Kurokawa; Ken Nakamura
- Book ID
- 107452822
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 162 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0361-5235
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