Higher charge state ion beam purity in the Eaton medium current implanter

✍ Scribed by Robert Simonton; Monty King; Dennis E. Kamenitsa

• Book ID: 113279728
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 392 KB
• Volume: 37-38
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90260-7