✦ LIBER ✦
High vacuum systems for sputtering applications : Spencer R. Wilder and Robert G. Johanson. Solid St. Technol., 95 (November 1985)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 242 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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