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High vacuum pumps according to Holweck principle for semiconductor production

✍ Scribed by Martin Mühlhoff; Hans-Peter Kabelitz

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 322 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)94163-k

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