✦ LIBER ✦
High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining
✍ Scribed by R. Fritschi; S. Frédérico; C. Hibert; Ph. Flückiger; Ph. Renaud; D. Tsamados; J. Boussey; A. Chovet; R.K.M. Ng; F. Udrea; J.-P. Curty; C. Dehollain; M. Declercq; A.M. Ionescu
- Book ID
- 113797656
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 371 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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