High transmission X-ray masks for lithographic applications : A. Bassous, R. Feder, E. Spiller and J. Topalian. Solid-St. Technol. p. 55 (September 1976)

• Book ID: 103274338
• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 128 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90058-0