✦ LIBER ✦

High-tone bulk acoustic resonators on sapphire, crystal quartz, fused silica, and silicon substrates

✍ Scribed by Zhang, Hao; Pang, Wei; Yu, Hongyu; Kim, Eun Sok

Book ID: 118737282
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 677 KB
Volume: 99
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2209029

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-tone bulk acoustic resonators on sa

High-tone bulk acoustic resonators on sapphire, crystal quartz, fused silica, and silicon substrates

✍ Zhang, Hao; Pang, Wei; Yu, Hongyu; Kim, Eun Sok 📂 Article 📅 2006 🏛 American Institute of Physics 🌐 English ⚖ 677 KB

High-tone bulk acoustic resonators (HBARs) have been fabricated on four types of substrates: c-axis sapphire, AT-cut crystal quartz, fused silica, and ⟨100⟩ single crystal silicon. Quality factors of the HBARs on the four substrates have been compared. Temperature effect on the Q and resonant freque

[IEEE 2007 IEEE International Frequency

[IEEE 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Geneva, Switzerland (2007.05.29-2007.06.1)] 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Effects of Substrate Residue on the Frequency Response of High-Tone Bulk Acoustic Resonator

✍ Lin, Re-Ching; Chen, Ying-Chung; Hsieh, Po-Tsung; Kao, Kuo-Sheng; Wang, Chih-Min 📂 Article 📅 2007 🏛 IEEE ⚖ 968 KB