✦ LIBER ✦
High throughput submicron lithography with electron beam proximity printing : H. Bohlen, U. Behringer, J. Keyser, P. Nehmiz, W. Zapka and W. Kulcke. Solid St. Technol. 210 (September 1984)
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 123 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0026-2714
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