✦ LIBER ✦
High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy
✍ Scribed by Lai, Y. W.; Hamann, S.; Ehmann, M.; Ludwig, A.
- Book ID
- 120221805
- Publisher
- American Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 702 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0034-6748
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