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High thermal stability and low electrical resistivity carbon-containing Cu film on barrierless Si

โœ Scribed by Nie, L. F.; Li, X. N.; Chu, J. P.; Wang, Q.; Lin, C. H.; Dong, C.


Book ID
111879715
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
663 KB
Volume
96
Category
Article
ISSN
0003-6951

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