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High Temperature Thermal Conductivity of Amorphous Al 2 O 3 Thin Films Grown by Low Temperature ALD

✍ Scribed by Cappella, Andrea; Battaglia, Jean-Luc; Schick, Vincent; Kusiak, Andrzej; Lamperti, Alessio; Wiemer, Claudia; Hay, Bruno


Book ID
120733957
Publisher
John Wiley and Sons
Year
2013
Tongue
English
Weight
350 KB
Volume
15
Category
Article
ISSN
1438-1656

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