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High temperature phase and morphological changes of CVD-SiC films studied using in situ X-ray diffractometry

✍ Scribed by Toshiki Kingetsu; Kenjiro Ito; Masaharu Takehara

Book ID: 117358530
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 790 KB
Volume: 36
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(98)00046-9

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