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High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere

✍ Scribed by Takayuki Narushima; Takashi Goto; Jun Hagiwara; Yasutaka Iguchi; Toshio Hirai

Book ID: 110826512
Publisher: John Wiley and Sons
Year: 1994
Tongue: English
Weight: 509 KB
Volume: 77
Category: Article
ISSN: 0002-7820
DOI: 10.1111/j.1151-2916.1994.tb04525.x

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