✦ LIBER ✦
High temperature millisecond annealing of arsenic implanted silicon : J. L. Altrip, A. G. R. Evans, J. R. Logan and C. Jeynes. Solid-St. Electron.33(6) 659 (1990)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 144 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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