High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

✍ Scribed by J. Cerdà Belmonte; J. Puigcorbé; J. Arbiol; A. Vilà; J.R. Morante; N. Sabaté; I. Gràcia; C. Cané

• Book ID: 108263520
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 683 KB
• Volume: 114
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/j.snb.2005.07.057