✦ LIBER ✦
High temperature failure of protective layers on silicon substrates in vacuum : E. A. Maydell. Vacuum 38(8–10), 745 (1988)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 142 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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