✦ LIBER ✦
High temperature annealings of Sb and Sb/B heavily implanted silicon wafers studied by near grazing incidence fluorescence EXAFS
✍ Scribed by C. Brizard; J.R. Regnard; A. Demourgues
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 133 KB
- Volume
- 208-209
- Category
- Article
- ISSN
- 0921-4526
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