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High-speed processing with high-energy SF6 cluster ion beam

✍ Scribed by T. Seki; J. Matsuo

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 214 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.071

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