High resolution transmission electron microscope study of solid phase epitaxial growth of very high dose, low energy P+ implanted (001) Si

✍ Scribed by J.J. Yang; L.J. Chen

• Book ID: 114168365
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 440 KB
• Volume: 121
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00442-9