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High-Resolution Subsurface Imaging of Silicon-Integrated Circuits

✍ Scribed by Ünlü, M. Selim; Ippolito, Stephen B.; Goldberg, Bennett B.


Book ID
115436910
Publisher
Optical Society of America
Year
2001
Tongue
English
Weight
87 KB
Volume
12
Category
Article
ISSN
1047-6938

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## Abstract Certain optical aberrations, such as defocus, can significantly degrade the signal collected by an imaging system, producing images with low resolution. In images with depth‐dependent detail, such degradations are difficult to remove due to their inherent spatially varying nature. In 19