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High-Resolution Submicron Patterning of Self-Assembled Monolayers Using a Molecular Fluorine Laser at 157 nm

✍ Scribed by Nae, Florin Andrei; Saito, Nagahiro; Hozumi, Atsushi; Takai, Osamu


Book ID
126035676
Publisher
American Chemical Society
Year
2005
Tongue
English
Weight
310 KB
Volume
21
Category
Article
ISSN
0743-7463

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