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High resolution spin dependent recombination study of hot carrier damage in short channel MOSFETs: 29Si hyperfine spectra

✍ Scribed by J.W. Gabrys; P.M. Lenahan; W. Weber


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
327 KB
Volume
22
Category
Article
ISSN
0167-9317

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