✦ LIBER ✦
High resolution Rutherford Backscattering Spectrometry investigations of ZrO2 layer growth in the initial stage on native silicon oxide and titanium nitride
✍ Scribed by M. Vieluf; F. Munnik; C. Neelmeijer; M. Kosmata; S. Teichert
- Book ID
- 113937714
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 876 KB
- Volume
- 520
- Category
- Article
- ISSN
- 0040-6090
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