High-resolution photoemission electron spectroscopy study on the oxynitridation of 6H-SiC(0001)-√3×√3R30° surface

✍ Scribed by J. Labis; J. Oh; H. Namatame; M. Taniguchi; M. Hirai; M. Kusaka; M. Iwami

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 279 KB
• Volume: 237
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.06.093