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High resolution optical lithography by formation of a built on mask (B.O.M.)

✍ Scribed by F.A. Vollenbroek; W.P.M. Nijssen; H.J.J. Kroon; B. Yilmaz

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 561 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90033-4

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