High-resolution observations of an amorphous layer and subsurface damage formed by femtosecond laser irradiation of silicon

✍ Scribed by Crawford, T. H. R.; Yamanaka, J.; Botton, G. A.; Haugen, H. K.

• Book ID: 120004198
• Publisher: American Institute of Physics
• Year: 2008
• Tongue: English
• Weight: 885 KB
• Volume: 103
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2885111