High-resolution laser lithography system based on two-dimensional acousto-optic deflection

✍ Scribed by Koechlin, Manuel; Poberaj, Gorazd; Günter, Peter

• Book ID: 121226372
• Publisher: American Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 712 KB
• Volume: 80
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.3202274