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High resolution heterodyne interferometer without detectable periodic nonlinearity

✍ Scribed by Joo, Ki-Nam; Ellis, Jonathan D.; Buice, Eric S.; Spronck, Jo W.; Schmidt, Robert H. Munnig

Book ID
115412618
Publisher
Optical Society of America
Year
2010
Tongue
English
Weight
237 KB
Volume
18
Category
Article
ISSN
1094-4087

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✍ Dejiao Lin; Hong Jiang; Chunyong Yin πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 301 KB

Metrological feasibilities of a high-resolution grating interferometer (GI) based on a transverse Zeeman laser are investigated. When the grating pitch equals 20 mm, a resolution of 0.7 nm is obtained by means of a heterodyne signal processing method. The comparison of two approaches for determining