High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers

✍ Scribed by Brizuela, F; Brewer, C; Fernandez, S; Martz, D; Marconi, M; Chao, W; Anderson, E H; Vinogradov, A V; Artyukov, I A; Ponomareko, A G; Kondratenko, V V; Attwood, D T; Bertness, K A; Sanford, N A; Rocca, J J; Menoni, C S

• Book ID: 120327645
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 481 KB
• Volume: 186
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/186/1/012026