✦ LIBER ✦
High resolution dry etching of III–V semiconductor materials using magnetically enhanced discharges
✍ Scribed by S.J. Pearton
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 699 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0921-5107
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