High-Resolution 19 F MAS NMR Spectroscopy of Fluorocarbon Films from Pulsed PECVD of Hexafluoropropylene Oxide

✍ Scribed by Lau, Kenneth K. S.; Gleason, Karen K.

• Book ID: 126246571
• Publisher: American Chemical Society
• Year: 1998
• Tongue: English
• Weight: 115 KB
• Volume: 102
• Category: Article
• ISSN: 0022-3654
• DOI: 10.1021/jp981240s