✦ LIBER ✦
High-reliability interconnection formation by a two-step switching bias sputtering process
✍ Scribed by Jin Onuki; Masayasu Nihei; Masahiro Koizumi
- Book ID
- 103427160
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 673 KB
- Volume
- 266
- Category
- Article
- ISSN
- 0040-6090
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