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High refractive index and high transparency HfO2 nanocomposites for next generation lithography

✍ Scribed by Bae, Woo Jin; Trikeriotis, Markos; Sha, Jing; Schwartz, Evan L.; Rodriguez, Robert; Zimmerman, Paul; Giannelis, Emmanuel P.; Ober, Christopher K.

Book ID: 115507747
Publisher: Royal Society of Chemistry
Year: 2010
Tongue: English
Weight: 163 KB
Volume: 20
Category: Article
ISSN: 0959-9428
DOI: 10.1039/c0jm00679c

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