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High rate single substrate polymer etching for multi- chip-modules (MCM) and off-chip-interconnect applications

✍ Scribed by E. Beynen; J. Roggen; R. Vanhoof; G.J.J. Brasseur; C. Jehoul


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
305 KB
Volume
17
Category
Article
ISSN
0167-9317

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