✦ LIBER ✦
High rate magnetron sputtering for metallizing semiconductor devices : Vance Hoffman. Solid St. Technol. p. 57 (Dec. 1977)
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 125 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0026-2714
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