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High-rate, low-temperature sputtering method of facing-targets type and its application for deposition of magnetic films

โœ Scribed by Youichi Hoshi; Masahiko Naoe; Shun'Ichi Yamanaka


Book ID
112075165
Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
566 KB
Volume
65
Category
Article
ISSN
8756-6621

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