✦ LIBER ✦
High-rate deposition of SiO2 by modulated DC reactive sputtering in the transition mode without a feedback system
✍ Scribed by H. Ohsaki; Y. Tachibana; J. Shimizu; T. Oyama
- Book ID
- 113205300
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 668 KB
- Volume
- 281-282
- Category
- Article
- ISSN
- 0040-6090
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