✦ LIBER ✦
High quality β-SiC films obtained by low-temperature heteroepitaxy combined with a fast carbonization step
✍ Scribed by H. Möller; M. Eickhoff; M. Rapp; H.W. Grueninger; G. Krötz
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 182 KB
- Volume
- 68
- Category
- Article
- ISSN
- 1432-0630
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