✦ LIBER ✦
High quality of ultra-thin silicon oxynitride films formed by low-energy nitrogen implantation into silicon with additional plasma or thermal oxidation
✍ Scribed by J.A Diniz; A.P Sotero; G.S Lujan; P.J Tatsch; J.W Swart
- Book ID
- 114172071
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 257 KB
- Volume
- 166-167
- Category
- Article
- ISSN
- 0168-583X
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