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High quality-low temperature aluminum oxide films deposited by ultrasonic spray pyrolysis

✍ Scribed by A. Ortiz; J. C. Alonso

Book ID: 110319299
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 376 KB
Volume: 13
Category: Article
ISSN: 0957-4522
DOI: 10.1023/a:1013134727665

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