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High quality factor single-crystal diamond mechanical resonators

✍ Scribed by Ovartchaiyapong, P.; Pascal, L. M. A.; Myers, B. A.; Lauria, P.; Bleszynski Jayich, A. C.

Book ID
118123564
Publisher
American Institute of Physics
Year
2012
Tongue
English
Weight
809 KB
Volume
101
Category
Article
ISSN
0003-6951

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## Abstract Finding ways to routinely and reliably produce larger near‐colorless and colorless single‐crystal diamond needed for a variety of applications in science and technology is a major challenge. Microwave plasma assisted chemical vapor deposition (MPCVD) techniques have been refined to prod