✦ LIBER ✦
High quality factor silicon cantilever driven by piezoelectric thin film actuator for resonant based mass detection
✍ Scribed by Jian Lu; Tsuyoshi Ikehara; Yi Zhang; Takashi Mihara; Toshihiro Itoh; Ryutaro Maeda
- Book ID
- 106185605
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 593 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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