✦ LIBER ✦
High-Q silicon micromachined cavity resonators at 30 GHz using the split-block technique
✍ Scribed by Stickel, M.T.; Kremer, P.C.; Eleftheriades, G.V.
- Book ID
- 114455360
- Publisher
- The Institution of Electrical Engineers
- Year
- 2004
- Tongue
- English
- Weight
- 577 KB
- Volume
- 151
- Category
- Article
- ISSN
- 1350-2417
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