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High-Q micromechanical resonators in a two-dimensional phononic crystal slab

✍ Scribed by Mohammadi, Saeed; Eftekhar, Ali Asghar; Hunt, William D.; Adibi, Ali

Book ID: 120934480
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 541 KB
Volume: 94
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3078284

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