High purity Si–C–N thin films with tailored composition on the tie line SiC–Si3N4

✍ Scribed by Rudolphi, M.; Bruns, M.; Baumann, H.; Geckle, U.

• Book ID: 123190384
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 549 KB
• Volume: 16
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2006.12.037