✦ LIBER ✦
High-precision optical lithography for gate process using an antireflective undercoating and local exposure dose control
✍ Scribed by Yoshiaki Mimura; Shinji Aoyama
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 431 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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