High precision electron beam positioning using computer image analysis for electron beam testing

✍ Scribed by John R. Michener

• Book ID: 104306162
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 551 KB
• Volume: 7
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(87)80015-1

✦ Synopsis

High precision electron beam positioning has been implemented in an electron beam tester using a relatively inaccurate mechanical positioner, the xy electron column field shift coils, and an image analysis computer to control the system. This system compares the observed circuit area with a reference circuit layout and determines positioning error values which it then corrects. Positioning precisions of +0.1 micrometers are easily achieved.