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High precision displacement measurement by statistical interferometry

✍ Scribed by Yoshinori Bitou; Hirohumi Kadono; Satoru Toyooka

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 87 KB
Volume: 26
Category: Article
ISSN: 0030-3992
DOI: 10.1016/0030-3992(94)90073-6

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